The 6 inch quartz cage boat is a high-purity wafer holding structure designed for secure and uniform support of 6-inch silicon wafers during high-temperature semiconductor processes. Its open "cage" design allows for superior gas flow distribution and thermal uniformity, making it especially effective in processes such as diffusion, oxidation, and LPCVD.

Compatible with a wide range of furnace systems and automation equipment, this quartz cage boat is ideal for semiconductor fabs and research environments demanding high reliability, dimensional precision, and contamination control. Custom designs are also available to suit specific process and equipment requirements.